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Simultaneous capacitive and electrothermal position sensing in a micromachined nanopositioner
- Zhu, Y., Moheimani, S. O. R., Yuce, M. R.
A micromachined nanopositioner with on-chip electrothermal actuation and sensing
- Zhu, Y., Bazaei, A., Moheimani, S. O. R., Yuce, M. R.
Ultrasonic energy transmission and conversion using a 2-D MEMS resonator
A 2-DOF wideband electrostatic transducer for energy harvesting and implantable applications
A low-loss MEMS tunable capacitor with movable dielectric
- Zhu, Y., Yuce, M. R., Moheimani, S. O. R.
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